*** This version of Confluence is for testing only and contains a copy of content from June 29th 2026. No changes will be preserved. ***
...
Contact managers of each e beam or mask making tool to learn how to convert from GDSII to the native file format for that tool. The e beam tools are the JEOL 6300FS and the JEOL 9500FSZ. The mask makers are the Mann 3600 optical Heidelberg DWL2000 laser pattern generator and the Heidelberg DWL66 laser pattern generator.
...