*** This version of Confluence is for testing only and contains a copy of content from June 29th 2026. No changes will be preserved. ***
...
Contact managers of each e beam or mask making tool to learn how to convert from GDSII to the native file format for that tool. The e beam tools are the JEOL 6300FS and the JEOL 9300FS9500FSZ. The mask makers are the Mann 3600 optical pattern generator and the Heidelberg DWL66 laser pattern generator.
...